UHV Stage VSM23-X

This long travel, modular UHV compatible linear translation stage provides translation from 50-200mm, loads of up to several tens of kilograms. They can be used standalone or as part of a complex motion system, as they are compatible with  all the VSM17 and VSM23 stages. They have very high rigidity, which is necessary where several transporters are stacked for compound motion or where offset loads are present. They are manufactured with UHV compatible material and construction methods and utilize AML UHV stepper motors.

View Datasheet

Features

UHV Compatible
Suited for use below 1 x 10-10 mBar(7.5 x 10-11 Torr) and bakeable to 200 °C(120 °C when optical
encoder fitted)

Travel Lengths
From 100 to 450 mm

Resolution and Repeatability
Standard resolution of 5 µm(1 µm for optional HR)
Repeatability better than 0.5 µm

Traverse Speed
Maximum Traverse speed of 25mm/sec (5mm/sec for option HR)

Compatibility
Stackable for XYZ orientations. Compatible with all VSM17 and VSM23 modular stages

Customizable
Can be fitted with limit switches or optical encoder. Please call our engineers to discuss specific, custom
needs

Options Available
High resolution HR, radiation resistant, Stainless steel SS

Specifications

MODELS DESCRIPTION
VSM23-X-100 100 mm travel, 5 µm resolution
VSM23-X-150 150 mm travel, 5 µm resolution
VSM23-X-200 200 mm travel, 5 µm resolution
VSM23-X-250 250 mm travel, 5 µm resolution
VSM23-X-300 300 mm travel, 5 µm resolution
VSM23-X-350 350 mm travel, 5 µm resolution
VSM23-X-400 400 mm travel, 5 µm resolution
VSM23-X-450 450 mm travel, 5 µm resolution

Not sure if Ultra-High Vacuum will work for your application?
Our specialists are happy to help.

Not sure if Ultra-High Vacuum will work for your application?
Our specialists are happy to help.

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