UHV Stage VSM17-Z

AML ultra high vacuum compatible vertical linear translation stages for z-axis translation of loads up to 30 kg. They can be
used standalone or as part of a complex motion system, as they are compatible with the range of VSM17 modular stages. The VSM17-Z is designed specifically for Z-axis translation with its high load capacity. They are manufactured with UHV-compatible materials and construction methods and utilize AML UHV stepper motors.

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Features

UHV Compatible
Suitable for use below 1 x 10-10 mBar (7.5 x 10-11 Torr) and bakeable to 200 °C (120 °C when optical encoder is fitted)

Travel Lengths
Travel of 50mm

Resolution and Repeatability
Standard resolution of 1 um
Repeatability of 0.26um

Traverse Speed
Traverse speeds from 5 mm/sec

Compatibility
Stackable for XYZ orientations. Compatible with all VSM17 and VSM23 modular stages

Customizable
Can be fitted with limit switches or optical encoder. Please call our engineers to discuss the feasibility of your specific, custom needs

Options available
High-resolution, radiation resistant, dry lubrication versions

 

Specifications

MODEL DESCRIPTION
VSM17-Z-050 50 mm Travel, 1 µm Resolution

Not sure if Ultra-High Vacuum will work for your application?
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Buyers’ Guide
Contact Ian

Not sure if Ultra-High Vacuum will work for your application?
Our specialists are happy to help.

Buyers’ Guide
Contact Ian

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    Micro Photonics Inc.
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