UHV Stage VSM17-R

AML ultra high vacuum compatible rotation stages are manufactured with UHV compatible material and construction methods in an ISO 7 cleanroom and utilize AML D35.1 UHV stepper motors. The VSM17-R stages feature a precision cross-roller ring bearing system, providing high rotational accuracy, 0.1° to 0.005° resolution, capable of bearing loads in every direction. It has an 18 mm clear aperture, anti-backlash spur gearing and can optionally be fitted with an optical UHV compatible rotary encoder.

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Features

UHV Compatible
Suitable for use below 1 x 10-10 mBar (7.5 x 10-11 Torr) and bakeable to 200 °C (120 °C when optical encoder is fitted)

Rotation range
Full 360 °

Resolution and Repeatability
Resolution of 0.1 ° or 0.005 °
Better than resolution unidirectional repeatability

Speed and Torque
Maximum loaded speed up to 100 rpm
Maximum torque of 8 Nm

Compatibility
Directly stackable for XYZ orientations. Compatible with all VSM17 and VSM23 modular stages

Customizable
Can be fitted with limit switches or optical encoder. Please call our engineers to discuss the feasibility of your specific, custom needs

Options available
High-resolution, radiation resistant versions available. Lubricated with NyeTorr® 6300 grease

 

Specifications

MODELS DESCRIPTION
VSM17-R-3K6 0.1° Resolution, Continuous Rotation
VSM17-R-72K 0.005° Resolution, Continuous Rotation

Not sure if Ultra-High Vacuum will work for your application?
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Buyers’ Guide
Contact Ian

Not sure if Ultra-High Vacuum will work for your application?
Our specialists are happy to help.

Buyers’ Guide
Contact Ian

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