UHV Stage VSM17-X

This linear translation stage is suitable for use in UHV and can support loads of up to 50 kg and travel from 50 to 200 mm. 1 µm or 5 µm resolution and zero backlash allows for precise in-vacuum motion. They can be used standalone or as part of a complex motion system, as they are compatible with the range of VSM17 modular stages. They have very high rigidity, which is necessary where several transporters are stacked for compound motion or where offset loads are present. They are manufactured with UHV compatible material and construction methods and utilize AML UHV stepper motors.

View Datasheet


UHV Compatible
Suitable for use below 1 x 10-10 mBar (7.5 x 10-11 Torr) and bakeable to 200 °C (120 °C when optical encoder is fitted)

Travel Lengths
From 50 to 200mm

Resolution and Repeatability
Standard resolution of 5 um (1um for HR option)
Repeatability is better than 0.5um

Traverse Speed
Traverse speeds from 5 to 15 mm/sec (3mm/sec for option HR)

Stackable for XYZ orientations. Compatible with all VSM17 and VSM23 modular stages

Can be fitted with limit switches or optical encoder. Please call our engineers to discuss the feasibility of your specific, custom needs

Options available
High-resolution, radiation resistant, dry lubrication versions




VSM17-X-050 50 mm Travel, 5 µm Resolution
VSM17-X-100 100 mm Travel, 5 µm Resolution
VSM17-X-150 150 mm Travel, 5 µm Resolution
VSM17-X-200 200 mm Travel, 5 µm Resolution

Not sure if Ultra-High Vacuum will work for your application?
Our specialists are happy to help.

Not sure if Ultra-High Vacuum will work for your application?
Our specialists are happy to help.

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    We are looking for a service engineer to join our team of experts in helping advance research by providing technical support and maintenance for micro-CT systems across the United States.

    Please submit resumes to: info@microphotonics.com

    Micro Photonics Inc.
    1550 Pond Road, STE 110
    Allentown, PA 18104



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