Thermal Gas Cracker

The Oxford Applied Research Universal Thermal Cracker exploits its established reactive gas-resistant e-beam heating technology. It incorporates a fine-bore inert cracker tube connected directly to the gas-inlet line, confining and minimizing gas load while providing a large surface area and long path length for high efficiency cracking at very low flow rates.The catalytic nature of the cracker tube substantially lowers the otherwise-high temperature and power necessary to achieve substantial (>70%) dissociation to <1000ºC at 60W. Also, in contrast to tungsten filament crackers, it can be used to dissociate O2, Cl2 and other reactive gases and constitutes a truly universal thermal cracker.

  • H2, O2, hydrides, halogens, HCs, NH3
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Features

Applications

  • “Soft” substrate cleaning
  • Oxides, Nitrides, Oxynitrides
  • Surfactants
  • Zero-damage hydrogen cleaning
  • Etching with H, Cl, Br

High dissociation efficiency

Ultra-clean operation

Very low power (<60W)

Dual/Back-up filament

Low Maintenance

Specifications

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