Thermal Gas Cracker

The Oxford Applied Research Universal Thermal Cracker exploits its established reactive gas-resistant e-beam heating technology. It incorporates a fine-bore inert cracker tube connected directly to the gas-inlet line, confining and minimizing gas load while providing a large surface area and long path length for high efficiency cracking at very low flow rates.The catalytic nature of the cracker tube substantially lowers the otherwise-high temperature and power necessary to achieve substantial (>70%) dissociation to <1000ºC at 60W. Also, in contrast to tungsten filament crackers, it can be used to dissociate O2, Cl2 and other reactive gases and constitutes a truly universal thermal cracker.

  • H2, O2, hydrides, halogens, HCs, NH3

Features

Applications

  • “Soft” substrate cleaning
  • Oxides, Nitrides, Oxynitrides
  • Surfactants
  • Zero-damage hydrogen cleaning
  • Etching with H, Cl, Br

High dissociation efficiency

Ultra-clean operation

Very low power (<60W)

Dual/Back-up filament

Low Maintenance

Specifications

Not sure if Ultra-High Vacuum will work for your application?
Our specialists are happy to help.

Not sure if Ultra-High Vacuum will work for your application?
Our specialists are happy to help.

Coming Soon:

Customer access to tips and instructional videos, method notes, tutorials, application notes, and other content to support your research.

Employment

While we are not currently looking to fill a specific position at Micro Photonics, if helping others advance their research is something you are passionate about, then feel free to send us your resume so that we can keep it for further considerations when a position does become available.

Please submit resumes to: info@microphotonics.com

Micro Photonics Inc.
1550 Pond Road, STE 110
Allentown, PA 18104

Events

Due to Covid-19 restrictions, we will not be attending tradeshows in the near future. We are participating in webinars and virtual tradeshows and will post links to those as they are available.

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Terms of Service for www.microphotonics.com

Introduction. Welcome to www.microphotonics.com. This website is owned and operated by Micro Photonics Inc. By visiting our website and accessing the information, resources, services, products, and tools we provide, you understand and agree to accept and adhere to the following terms and conditions as stated in this policy (hereafter referred to as ‘User Agreement’), along with the terms and conditions as stated in our Privacy Policy (please refer to the Privacy Policy section below for more information).

This agreement is in effect as of October 25, 2018.

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