MEMS Active Pirani and Piezo Gauge

The AGP Pirani and Piezo Gauge incorporates cutting edge MEMS sensor technology and digital signal processing and advanced measurement algorithms. Combined with precision automated manufacturing and calibration processes, this product provides uncompromised measurement performance. The well-known gas dependency in the rough vacuum range
of thermal conductivity gauges has been eliminated by integrating a MEMS diaphragm sensor that offers precision performance comparable to more expensive capacitance manometers. This feature ensures more accurate control
of vacuum system venting processes and can prevent over-pressurization of the vacuum system.


Measurement range: 1 x 10-6 mBar to 1333 mBar (7.5 x 10-7 to 1000 Torr)

Ultra-wide range high performance MEMS Pirani sensor

Advanced innovative digital signal processing

Precision gas-independent sensor from 5 to 1333 mBar

0 – 10 Vdc programmable voltage output

Mountable in any orientation without impact on performance

Programmable voltage output signal

Digital RS-232 interface

One solid-state relay for process control

High overpressure tolerance of 10 bar (145 psi) absolute


AGP-1 Active Pirani Gauge DN16 KF
AGP-1 to NGC3 Adapter
DB9 female to an 8P8C RJ45 adapter for connecting an AGP-1 Active Pirani Gauge to an NGC3 Ion Gauge Controller.
NGC3 Ion Gauge Controller with Active Gauge Input
High-accuracy Ion Gauge controller that offers integrated pressure measurement and control of Ionisation and Active gauges.
Centering Ring
For mating KF flanges and includes the centering ring and O-ring. The centering ring contains a rubber elastomeric fluorocarbon O-ring.
Swing Clamp
Used in conjunction with a centering ring for mating KF flanges.

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Not sure if Ultra-High Vacuum will work for your application?
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    Service Engineer opening for Micro-CT Systems

    We are looking for a service engineer to join our team of experts in helping advance research by providing technical support and maintenance for micro-CT systems across the United States.

    Please submit resumes to:

    Micro Photonics Inc.
    1550 Pond Road, STE 110
    Allentown, PA 18104



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