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- MEMS Active Pirani and Piezo Gauge
MEMS Active Pirani and Piezo Gauge
The AGP Pirani and Piezo Gauge incorporates cutting edge MEMS sensor technology and digital signal processing and advanced measurement algorithms. Combined with precision automated manufacturing and calibration processes, this product provides uncompromised measurement performance. The well-known gas dependency in the rough vacuum range
of thermal conductivity gauges has been eliminated by integrating a MEMS diaphragm sensor that offers precision performance comparable to more expensive capacitance manometers. This feature ensures more accurate control
of vacuum system venting processes and can prevent over-pressurization of the vacuum system.
Features
Measurement range: 1 x 10-6 mBar to 1333 mBar (7.5 x 10-7 to 1000 Torr)
Ultra-wide range high performance MEMS Pirani sensor
Advanced innovative digital signal processing
Precision gas-independent sensor from 5 to 1333 mBar
0 – 10 Vdc programmable voltage output
Mountable in any orientation without impact on performance
Programmable voltage output signal
Digital RS-232 interface
One solid-state relay for process control
High overpressure tolerance of 10 bar (145 psi) absolute
Specifications
| MODELS | DESCRIPTION |
| AGP-1 | Active Pirani Gauge DN16 KF |
| RELATED PRODUCTS | |
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AGP-1 to NGC3 Adapter DB9 female to an 8P8C RJ45 adapter for connecting an AGP-1 Active Pirani Gauge to an NGC3 Ion Gauge Controller. |
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NGC3 Ion Gauge Controller with Active Gauge Input High-accuracy Ion Gauge controller that offers integrated pressure measurement and control of Ionisation and Active gauges. |
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Centering Ring For mating KF flanges and includes the centering ring and O-ring. The centering ring contains a rubber elastomeric fluorocarbon O-ring. |
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Swing Clamp Used in conjunction with a centering ring for mating KF flanges. |
Not sure if Ultra-High Vacuum will work for your application?
Our specialists are happy to help.
Not sure if Ultra-High Vacuum will work for your application?
Our specialists are happy to help.