
Premium Custom-Designed System for TMDC & h-BN
Graphene Square introduces the advanced CVD system for the synthesis of 2D materials from a chip to a wafer, including the synthesis of graphene, h-BN, TMDC’s on various substrates by use of gas-phase or solid precursors and metal-organic (MO) sources. A CVD system like no other for the future of materials and electronics.
The TCVD-RF100CA is an advanced system with computer aided control for the processes. With the flexibility to have up to 10 MFC’s for gas control + 3 MO sources for gas phase synthesis, along with 3 heating zones and a RF unit, this is a true workhorse for the advancement of 2D materials.
The TVCD-RF100CA Features
The TCVD-CRF100A Advantages
Quality, advanced equipment that is customizable to your research needs.
Contact Micro Photonics for more information at 610-366-7103 or info@microphotonics.com
TCVD-RF100CA Specifications
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CVD Reactor
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Tube type 4 inch diameter quartz
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Substrate Size
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Lateral insertion of 10mm to <4 inch wafers possible. (Loading frames for small samples) Rolled metallic foils can be loaded to synthesize A4 sized or larger 2D materials |
Heating
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Dual-zone heater and controller for graphene/h-BN synthesis. Single-zone precursor heater and Dual-zone deposition heater for TMDC synthesis The heaters are movable along two rails and the distance can be motor-controlled, enabling 10 degree C/sec or faster temperature change rate |
Base Pressure
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10-5 mbar (depending on the dryness of source)
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Operating Pressure
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10-3 mbar – 1 bar
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Precursor
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Max 10 gas lines Metal oxide sources of various transition metals placed in Heat Zone 1 for solid source growth |
Other Metal Organic (MO) sources
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Extra 3 Metal-Organic source injection ports are included Low-T cold trap for residual sources |
Flow Control
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Precursor gases: -.1 – 10 sccm Other gases: 10-1000 sccm Automatic Flow control |
Vacuum
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Turbo pump 450 l/s (ISO160)<10-6 mbar Dry scroll pump < 10-1 mbar |
Sample Switching
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Position switching by sample loading stage
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System Control
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Control PC system(12″ touch, dual core)
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We work with you to make it possible, helping you through the process.
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