1-866-334-4MPI (4674)
Premium Custom-Designed System for TMDC & h-BN
Graphene Square introduces the advanced CVD system for the synthesis of 2D materials from a chip to a wafer, including the synthesis of graphene, h-BN, TMDC’s on various substrates by use of gas-phase or solid precursors and metal-organic (MO) sources. A CVD system like no other for the future of materials and electronics.
The TCVD-RF100CA is an advanced system with computer aided control for the processes. With the flexibility to have up to 10 MFC’s for gas control + 3 MO sources for gas phase synthesis, along with 3 heating zones and a RF unit, this is a true workhorse for the advancement of 2D materials.
The TVCD-RF100CA Features
The TCVD-CRF100A Advantages
Quality, advanced equipment that is customizable to your research needs.
Contact Micro Photonics for more information at 610-366-7103 or info@microphotonics.com
|
TCVD-RF100CA Specifications
|
|
|
CVD Reactor
|
Tube type 4 inch diameter quartz
|
|
Substrate Size
|
Lateral insertion of 10mm to <4 inch wafers possible. (Loading frames for small samples) Rolled metallic foils can be loaded to synthesize A4 sized or larger 2D materials |
|
Heating
|
Dual-zone heater and controller for graphene/h-BN synthesis. Single-zone precursor heater and Dual-zone deposition heater for TMDC synthesis The heaters are movable along two rails and the distance can be motor-controlled, enabling 10 degree C/sec or faster temperature change rate |
|
Base Pressure
|
10-5 mbar (depending on the dryness of source)
|
|
Operating Pressure
|
10-3 mbar – 1 bar
|
|
Precursor
|
Max 10 gas lines Metal oxide sources of various transition metals placed in Heat Zone 1 for solid source growth |
|
Other Metal Organic (MO) sources
|
Extra 3 Metal-Organic source injection ports are included Low-T cold trap for residual sources |
|
Flow Control
|
Precursor gases: -.1 – 10 sccm Other gases: 10-1000 sccm Automatic Flow control |
|
Vacuum
|
Turbo pump 450 l/s (ISO160)<10-6 mbar Dry scroll pump < 10-1 mbar |
|
Sample Switching
|
Position switching by sample loading stage
|
|
System Control
|
Control PC system(12″ touch, dual core)
|
We work with you to make it possible, helping you through the process.
A step-by-step guide to finding the best Graphene solutions for you.
