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    Home / Products / Graphene / TCVD-100A – Graphene and 2D Materials

    TCVD-100A – Graphene and 2D Materials

    Graphene & 2D Material Thermal CVD System - 4 inch 

    This manually-controlled, adaptable, full-sized floor model system is designed for intensive research. It is a sophisticated and cost-effective CVD system that can be optimized for graphene, CNT, h-BN, and TMDC growth. This system can also be adapted for the synthesis of plasma enhanced (PECVD) or metal organics (MOCVD). A safety cabinet with toxic gas sensors is built into all floor models.

    The option for dual chambers makes it easier to produce different samples at the same time, such as Graphene and TMDC, without cross-contamination. The movable dual-furnace system enables the fast heating and fast cooling of source materials and substrates, which is important for the synthesis of higher quality TMDCs, such as MoS2 and WSe2. Semi-automation with push button control for movement of the furnaces is standard on this model.

    To determine if this system is right for your research needs, or how to best customize it for your purposes, please contact us and our engineers will assist you to select and customize an appropriate instrument for your research or production applications.


    • Available as a 2, 4, 6, or 8 inch chamber tube furnace for high-quality graphene and 2D material synthesis.
    • Packages can be added for the synthesis of TMDC, h-BN or CNT
    • Water cooling
    • Process temperature: ~1,100 degree C
    • Uniformity of Film Thickness: + or – 3%
    • Movable furnace method is our unique knowhow for fast heating and fast cooling of the sample
    • Standard Safety box
    • Tested and Proven with over 100 installed instruments within Korea and many more around the world


    • Glove box for air sensitive samples.
    • Dual chamber system


    • Consultation: Our engineers are expert in these systems and will work with you to determine the best system for your research needs, with no pre-commitment
    • Customization: We are expert in working with the manufacturer to optimize the instrument you choose to best suit your needs and budget
    • Installation: We will install your system and ensure its safe operation
    • Training: We provide on-site training for safe operation, following best practices
    • Support: We are available to answer your questions and resolve any issues after installation and provide ongoing support thereafter


    The TCVD-100A Advantages

    Quality, advanced equipment. Customize to your research needs.

    • Furnaces – Single, double, or a single with RF M/W Module
    • Chamber size – 4 inch standard, or your choice of 2 inch, 6 inch or 8 inch
    • Pumping system – Oil type, dry scroll pump, or additional mechanical turbo pumps for required pumping
    • Gas Control Units – 4 MFC’s standard but able to equip 8 MFC’s

    Packages for TMDCs, h-BN and CNT

    Customize the CVD systems to Transition Metal Dichalcognides (TMDC), Boron Nitride (h-BN), and Carbon Nanotubes (CNT). CLICK HERE to learn about the setup requirements to achieve high quality TMDC, h-BN and CNT or a combination all on the same instrument.

    Contact Micro Photonics for more information at 610-366-7103 or

    • Compact: Convenietly small footprint for the lab 69x64x29.5 inches
    • Designed for safety: Standard safety box enclosure
    • Ability: Optimized for graphene, CNT, h-BN, and TMDC
    • Cost benefit: Budget friendly with high quality results
    • Unique quality: Movable furnace method is our unique knowhow for fast heating and fast cooling

    The ability to customize the system for your specific synthesis.

    contact Micro Photonics at 610-366-7103 or

    TCVD-100A Specifications
    Quartz tube
    single(two heating zones – Standard), double(three heating zones), single + RF M/W Module
    rotary pump (standard), dry scroll pump or additional turbo pumps available
    Water cooling
    Yes for system stability ( chiller not included)
    Gas Control
    3 MFC’s + 1 spare (standard), expandable up to 8 MFC’s
    Safety Cabinet Included Standard
    Dimensions 69(W) x 64.5(H) x 29.5(D)

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