Ultra-High Vacuum for Uniform Thin Film Deposition

The mini E-beam from Oxford Applied Research can be used with rod or crucibles to evaporate and deposit uniform thin layers on substrates under Ultra-High Vacuum conditions. The EG series provide a voltage range of 0-1000V plus hardware flux control and shutters, and are high quality E-beam evaporators. The EG series can be equipped with up to 4 pockets and ability to co-evaporate 2 pockets at a time. 

Visit Ultra-High Vacuum Applications Center
Contact Steve
Contact Steve

Calibrated low flux rate (material dependent)

The Oxford Applied Research mini E-beam provides a calibrated low flux rate, which is material dependent. The Silicon coverage is calculated to be 0.2ML from this image, therefore a 4nA flux  corresponds to a rate of 0.8ML/min (0.11nm/min). Data provided by Dr. Matt Butcher: University of New South Wales, Australia

Deposition and Ion Current Rates

This graph demonstrates the typical Molybdenum (Mo) deposition and Ion Current rate curves compared to Power (Watts) input, in which Mo was used in Rod form in the Oxford Applied Research EG Series Mini E-beam evaporator.

Related Products

View All Products

Related Articles

Visit Product Education

How does an ion gauge work?

Ion gauge history Arun Microelectronic’s (AML) nude ionization gauges are designed on the principals explored by Robert T. Bayard and Daniel Alpert in the 1950s.

Ann Bagnell January 21, 2026
Visit Product Education

Not sure if Ultra-High Vacuum will work for your application?
Our specialists are happy to help.

Buyers’ Guide
Contact Steve

Not sure if Ultra-High Vacuum will work for your application?
Our specialists are happy to help.

Buyers’ Guide
Contact Steve

Ultra-High Vacuum Buyer's Guide




    US Partner Form









      Coming Soon:

      Customer access to tips and instructional videos, method notes, tutorials, application notes, and other content to support your research.

      Employment

      Our people are the key to our success.

      We seek and employ talented scientists who have the curiosity and knowledge to offer intelligent collaboration with the researchers who are our customers. We don’t have any openings but would be happy to receive resumes to hold on file.

       

      Please submit resumes to: info@microphotonics.com

      Micro Photonics Inc.
      1550 Pond Road, STE 110
      Allentown, PA 18104

      Tel: 1-866-334-4MPI (4674)
              (610) 366-7103
      Fax: (610) 366-7105

      Events

      CONFERENCES

      ORS 2026 Annual Meeting
      March 27 – 31, 2026
      Charlotte Convention Center
      Charlotte, NC
      2026 Annual Meeting – ORS

      Preclinical Imaging Consortium
      Philadelphia, PA
      April 13-15, 2026

      AALAS National Meeting
      Houston, TX
      Oct. 25-29, 2026
      AALAS

      Privacy Policy

      What information do we collect? We collect information from you when you register on our site, place an order, subscribe to our newsletter or fill out a form. When ordering or registering on our site, as appropriate, you may be asked to enter your: name, e-mail address, mailing address, phone number or credit card information. You may, however, visit our site anonymously.
      What do we use your information for? Any of the information we collect from you may be used in one of the following ways:

      ; To personalize your experience (your information helps us to better respond to your individual needs).

      ; To improve customer service (your information helps us to more effectively respond to your customer service requests and support needs).

      ; To process transactions. Your information, whether public or private, will not be sold, exchanged, transferred, or given to any other company for any reason whatsoever, without your consent, other than for the express purpose of delivering the purchased product or service requested.

      ; To send periodic emails .The email address you provide for order processing, will only be used to send you information and updates pertaining to your order.Note: If at any time you would like to unsubscribe from receiving future emails, we include detailed unsubscribe instructions at the bottom of each email.

      Terms and Conditions

      Terms of Service for www.microphotonics.com

      Introduction. Welcome to www.microphotonics.com. This website is owned and operated by Micro Photonics Inc. By visiting our website and accessing the information, resources, services, products, and tools we provide, you understand and agree to accept and adhere to the following terms and conditions as stated in this policy (hereafter referred to as ‘User Agreement’), along with the terms and conditions as stated in our Privacy Policy (please refer to the Privacy Policy section below for more information).

      This agreement is in effect as of October 25, 2018.

      We reserve the right to change this User Agreement from time to time without notice. You acknowledge and agree that it is your responsibility to review this User Agreement periodically to familiarize yourself with any modifications. Your continued use of this site after such modifications will constitute acknowledgment and agreement of the modified terms and conditions.

      Responsible Use and Conduct. By visiting our website and accessing the information, resources, services, products, and tools we provide for you, either directly or indirectly (hereafter referred to as ‘Resources’), you agree to use these Resources only for the purposes intended as permitted by (a) the terms of this User Agreement, (b) the terms of any applicable confidentiality, non-disclosure, or other agreement between you and a third party, and (c) applicable laws, regulations and generally accepted online practices or guidelines.

      Ultra-High Vacuum Buyer's Guide




        Talk to an Ultra-High Vacuum specialist about your application

        Call Now Button