|
|
||||||||||||||
White Light Optical Sensors
![]() |
CHR Main Features
|
![]() |
CCS Main Features
|
![]() |
|
An innovative modular design achieves up to 30 different optical pen configurations for specific depth of field, spot size, working distance, object slope and photometric efficiency. Choose from a selection of five magnifiers, ranging from 20mm to 210mm focal lengths, and six different chromatic lenses, 100µm to 24mm depth of fields. Pens can achieve maximum axial resolution of 0.005µm, accuracy to 0.02µm and max slope to 87º for diffusive objects.
Pens can be used in OEM applications or integrated in a comprehensive profilometry system. Acquisition speed to 30,000Hz, multiple control configurations, (PCI card, control unit, computer interface) and a comprehensive software package satisfy specific vibrometry, in-line and off-line quality control requirements. |
|
| ADVANTAGES | MATERIALS/ APPLICATIONS |
|
|
|
Optical Measuring Pen - Specifications Choice of several interchangeable displacement probes to fit the MicroMeasure. |
|||||||
Measurement Range |
Working Distance (mm) |
Axial Resolution (nm) |
Axial Accuracy (nm) |
Spot Diameter (µm) |
Lateral Resolution (µm) |
Max. Slope (°) ** |
Min Measurable Thickness (µm) |
|
20µm |
0.37 |
2 |
10 |
3 |
1.5 |
48 |
12 |
130µm |
3.3 |
5 |
20* |
2* |
1.1* |
43 |
7* |
|
300µm |
5.68 |
10 |
90 |
7.4 |
3.7 |
25 |
25 |
|
350µm |
12.7 |
10 |
60 |
7 |
3.5 |
27 |
25 |
400µm |
11 |
12 |
60 |
2.6* |
1.3* |
28 |
15* |
|
1mm |
23.9 |
30 |
300 |
14 6 |
6 |
24 |
23 |
1.2mm |
12.7 |
25 |
200 |
4 |
2 |
27 |
25 |
|
3mm |
26.9 |
100 |
600 |
25 |
12.5 |
12 |
220 |
3.5mm |
16.4 |
75 |
400 |
8 |
4 |
22 |
60 |
|
10mm |
66.9 |
300 |
900 |
51 |
25.5 |
12 |
425 |
12mm |
29 |
280 |
900 |
16 |
8 |
14 |
200 |
24mm |
222.3 |
1500 |
3000 |
100 |
50 |
5 |
1570 |
27mm |
19.6 |
600 |
3000* |
16 |
8 |
8.6 |
590 |
2µm - 100µm (Interferometric) |
42 |
10 |
100 |
20 |
10 |
7 |
2 |
* Theoretical numbers, to be proven.
** on specular surfaces. For scattering surfaces the maximum angular slope can reach 80 degrees.
|
For Further information fill out our on-line request form or contact us at 1-866-333-4674:
Micro Photonics Inc. Micro Photonics Inc.
|
Key words: Stress Internal Stress, Tensor, thin Films, Coatings, Metal, stresses, Stress Internal Stress, Tensor, thin Films, Coatings, Metal, stresses, Stress Internal Stress, Tensor, thin Films, Coatings, Metal, stresses, Stress Internal Stress, Tensor, thin Films, Coatings, Metal, stresses, Stress Internal Stress, Tensor, thin Films, Coatings, Metal, stresses, Stress Internal Stress, Tensor, thin Films, Coatings, Metal, stresses, Stress Internal Stress, Tensor, thin Films, Coatings, Metal, stresses, Stress Internal Stress, Tensor, thin Films, Coatings, Metal, stresses, Stress Internal Stress, Tensor, thin Films, Coatings, Metal, stresses, Stress Internal Stress, Tensor, thin Films, Coatings, Metal, stresses