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SPM ProberStation 150
Surface Scanning Inspection & Rapid Defect Inspection of Wafers
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Main Features
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A growing need for large surface inspection in the nanometer scale requires new and novel instrumentation. The SPM ProberStation 150 combines three dimensional inspection with modern optical microscopy and a vision inspection Built around a granite stage, which was specially designed to achieve a high degree of stability in nanometer movements in the lateral (X-Y) and horizontal (Z) directions. It is also specifically optimized to minimize undesired movement in the Z direction in connection with large movements in the lateral plane. Mapping of the lateral plane can be programmed using a PC. A joystick allows automatic function such as: shifting between inspection through the optical microscope and through the SPM, AFM instrument function. A built-in optical microscope which is equipped with Normaski (DIC), easily observes even the smallest details. The standard version is equipped with a manual zoom function and manual adjustment of the focal plane, automatic control is optional. Additional options include an image processing module for automatic feature analization of defined areas. Automatic location and inspection which can be performed along with defining coordinates for SPM inspection. |
Mechanical |
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| Motor: | Stepper motor precision spindles |
| Stage: | Highly stable black granite, minimal thermal expansion |
| Travel X-Y: | 150 mm x 250 mm |
| Repeatability: | ± 200 nm |
| Vertical Stability: | 0.1 nm |
Linear Encoders: |
Accuracy 1 µm, resolution 100 nm for feedback over the whole X-Y range. |
Optical |
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| Normaski (DIC) Optical Microscope (Other Microscope types available on request) | |
| Magnification: Std. 20 x microscope objective with manual zoom (1:5), manual focus | |
| Super Sensitive sensor: Exview HAD CCD | |
| Pixels: 752 x 582 (PAL), 768 x 494 (NTSC) | |
| High performance Frame Grabber installed in PC for video capture and documentation | |
Vibration Isolation |
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| Isolation Technology : | Technology based on piezoelectric type acceleration pickup, fast signal processing and electro-dynamic type force transducers |
| Controls Electronics: | Easy to navigate menu for all settings, second graphics display for vibration levels |
| Force Directions: | Active compensation in all six degrees of freedom |
| Isolation performance: | > 5 Hz = 25 dB (94.4%); > 10 Hz = 40 dB (99.0%) |
| Active Bandwidth: | 0.6 200 Hz* |
| Setting time: | 300 ms |
| Max. Correction Forces: | Vertical ± 8 N; Horizontal ± 4 N |
| Load Capacity: | 0 - 100 kg |
Specifications |
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DME Scanner Type |
2452 | 2545 | 2370 | 2546 | |
| Name | DS 95-50 | DS 95-50 E | DS 95-200 | DS 95-200 E | |
Scanner Volume |
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| XY scan size | 50 x 50 | 50 x 50 | 200 x 200 | 200 x 200 | |
| Z Range (micron) | |||||
Guaranteed: |
2.7 | 2.7 | 1.5 | 1.5 | |
Actual: |
3.5 | 3.5 | 18 | 18 | |
| Other scan ranges available upon request | |||||
| Vertical accuracy/ linearity | |||||
| Linearity | By active linearization module better than 0.5% of full dynamic range | ||||
| Resolution | 16 bit resolution | 16 bit resolution |
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| Typical < 40 pm (rough sample) | Typical < 200 pm (rough sample) | ||||
| < 1 pm for flat samples, no physical slope. | < 1 pm for flat samples, no physical slope. | ||||
| Evaluated via subatomic step height on annealed GaN sample. | |||||
| Noise: | 300 pm PP | 300 pm PP | |||
| < 30 pm RMS | < 30 pm RMS | ||||
| Lateral accuracy/linearity | |||||
| Linearity: | At 50% for full scale accuracy better than 1% | ||||
| Resolution: | 16 bit resolution on all axis | 16 bit resolution on all axis | |||
| < 80 pm | < 300 pm | ||||
| Offset: | Independent 16 bit | ||||
| Noise: | < 2 nm RMS | < 5 nm RMS | |||
| Approach | |||||
| Type | Automatic linear piezo motor ( 3 modes controller) | ||||
| Travel: | > 1.5 mm |
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| Step Size (single step mode) | > 1 µm |
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Precision |
> 50 nm | ||||
| Operation | |||||
| Standard Modes: | See scanner modes overview | ||||
| Imaging | Topography, phase contrast, lateral force, force/distance, constant height, frequency, level, amplitude, app. amplitude, error signal, loop out, xposition, ADC 1 in, X pos slow, Z-linearization, Two user-defined inputs (10 V, 16 bit) | ||||
| CCD Camera and objective (built in optical microscope) | |||||
| Objective Type (optical microscope) | Bright Field | ||||
| Field of view (CCD) | 1 x 0.75 mm | ||||
Focal length |
95 mm | ||||
| (optical microscope) | |||||
| Magnification | 15 x (optical microscope), 390 x (CCD) on a 19" monitor | ||||
| Resolution (CCD) | < 2 µm, 512 x 350 pixels | ||||
| Physical Properties | |||||
| Weight | 250 g. | ||||
| Cable length | 2 m (other lengths available on request) | ||||
| Electrical features of Dualscope C-21 control system | |||||
| DSP and microprocessor control: 32 MHz, 16 MHz | |||||
| Communication to PC: GPIB | |||||
| DAC lateral conversion: 4 x 16 bit | |||||
| ADC vertical conversion: 1 x 16 bit, 1 x 13 bit Gain (Resolution control, 29 bit conversion) | |||||
| Software | |||||
| SPM software, Auto control for data acquisition, data processing, data presentation & measurement automation | |||||
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system.
infoca@microphotonics.com