For Immediate Release

Contact: Julie Guaderrama-Bascopé

Marketing Communications Coordinator

Phone (949) 461-9292, julie@microphotonics.com

Irvine, California – August 9, 2005 – Micro Photonics, Inc. today introduced the Environmental MEMS Chamber, the most comprehensive option for those wishing to study MEMS Characterization. The Environmental MEMS Chamber is specifically designed to allow full control of environmental conditions while performing in-plane and out-of-plane stroboscopic interferometric microscopy.

“Studying MEMS in actuation is an increasingly important part of microdevice manufacturing,” Said Pierre Leroux, General Manager of Micro Photonics Surface Test Division. “Concerns about reliability, vacuum packaging and device aging motivate the need to seek an improved way to study MEMS under control of environmental parameters. We're excited to expand our line of profilers to include the Environmental Chamber, we believe it's the most complete system for researching static and dynamic characterization available.”

Users can perform electrical and mechanical testing as a function of environmental parameters such as temperature (-25ºC to +65ºC), varying gases or vacuum to 10 -6 millibars. The range of available studies include: stroboscopic deformation shape measuring tool, real-time mode, selection of vibration studies, amplitude vs. frequency or amplitude vs. time measurements, static and dynamic device deflection (quality, rising/falling time), mode shapes studies, resonant frequencies and quality factor evaluations. All studies can be performed in electro-static, piezo or thermal actuation. Additionally, users have multiple options for analysis including: real-time video of measurement, real-time vector analysis and average displacement over the entire area or defined areas of study.

The Environmental MEMS Chamber is available as an additional option on the Photomap 3D or Zoomsurf 3D, with optional dynamic characterization module, for in-plane and out-of-plane real-time vibration mode studies from 100Hz to 2MHz. The Photomap 3D and Zoomsurf 3D are non-contact profilers based on white light Vertical-Scanning Interferometry (VSI) and Phase Shift Interferometry (PSI).

This exclusive technology is available from Micro Photonics Inc. Micro Photonics has been a leading supplier of materials technology instruments and laboratory testing for over twelve years. The company specializes in: Nano and Micro Mechanical Testing, X-Ray Micro Tomography, Ellipsometery, X-Ray Diffraction, 3D Non-Contact Profilometry, Thin Film Analysis, Biological Imaging Instruments and NSOM/SPM/AFM systems.

For more information regarding this or any other instrument please call

Julie Guaderrama-Bascopé, Phone 949-461-9292, or e-mail julie@microphotonics.com

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