Introduction to the Microsurf 3D

The Microsurf 3D is a non-contact profiler on a microscope base designed for use in research and industrial laboratories. Extremely accurate interferometric measurements make this instrument ideal for intricate samples including MEMS and bacterial studies. Sub-nanometer vertical resolution allow for precise details on super smooth and rough surfaces. For more information on white light interferometer and phase shift based theory itself please follow this link. The Microsurf 3D can also be equipped with an automatic X-Y motorized table. With these options, the measurements can be programmed to cover larger areas with automatic stitching capabilities.  The user can choose from a wide selection of various objectives (Mirau, Michelson, Linnik & Nikon).

Profilers can be equipped with a frequency generator for stroboscopic study of active MEMS & Membranes. Allowing the user to study 3D real time vibration modes of MEMS & Membranes in motion, a breakthrough for the study of those materials. Generator can pulse from 100Hz to 2MHz with steps of 0.1Hz and voltage from +10 to -10 Volts. All resonance frequencies of the device can easily be determined by automatic scan of all frequencies.

The Microsurf is equipped with the powerful Mountain Analysis Software.  The Mountain Profile software tool delivers cutting edge technology in analysis and visualization. Create eye-catching reports with pseudo-color 3D and 2D images, contour diagrams, 3D lined and 3D continuous representation. Other features include: Abbot and Firestone curve 3D depth distribution, fractal analysis, peak distribution, angle and distance measurement, material and void volume between two slices, hole analysis, power spectrum analysis, auto correlation and much, much more. Please visit our application page to see some of the results obtained with the system.

Options of Microsurf 3D

Various configurations to meet your specific needs
- Adaptation to the object shape (size, shape)
- Spatial sampling improvement (1024 x 1024)
- X-Y Motorization of the sample holder for automatically stitching images of larger surfaces
- Objective with longer working distances up to 20mm
- Continuous zoom ratio from 0.3 to 1.6 times