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"Industry Leader in its class" |
MicroTopography / Surface Roughness / Dimensional Metrology
Film Thickness Measurements / Form and Texture Surface Analysis
Precision Machining Quality Control / Industrial Surface Testing |
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Browse through more than 80 applications!
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Nanovea ST400 Non-Contact Optical Profiler uses white light & the unique chromatic aberration technique. This technique has shown to be much better than laser techniques in measuring roughness. With accuracy in the nanometer range and a maximum measuring height range of up to 27mm, the Nanovea ST400 has the unique capability of not only be able to do very accurate roughness measurements but also can do dimensional measurements on the same instrument. Chromatic aberration technique has also the advantages of working for high angular slope conditions (up to 80degree for specular surfaces) and on samples with low reflectivity. Therefore the Nanovea ST400 works for a wider variety of applications compared to white light interferometry /phase shift and laser techniques. The Nanovea VS200 is a variation seen below that allows larger tables up to 300mm, rotation stage and other custom systems. All systems are equipped with two powerful complementary software. A user-friendly software allows easy setup of parameters such as the scan size, the number of lines, the step size, the translation stages speed, the data acquisition rate, the selected probe. The ULTRA, EXPERT and PROFESSIONAL version of 3D MOUNTAINS MAP data post-processing software allows a lot of surface and profile analysis and studies like : Abbott-Firestone curve, FFT, auto correlation function, 3D representation, slices and much more.
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| Options including Pen Turret, Video Zoom, microscope & AFM and Advanced Machine Vision | ||
Multi-Pen Turret: A multi-pen turret can now be added to the Nanovea ST400 and VS200. By combining up to 3 magnifiers and 3 chromatic lenses, the user can now easily switch between 9 Optical Pen configurations. These configurations could vary in their working distance, measurement range, spot size, or resolution depending on which combination is chosen. Call for more details. |
- Video Zoom System (fixed or multiple): Select area, or areas, of interest and the 3D software will automatically scan the position for height information. | - Rotative Table and Bore Applications: The ST-400 can come with a rotative table for special applications. A 90degree optical pen can also be used to image the inside of bore. Please call us for your specific applciation. |
- Video Microscope with Turret: A full microscope can be installed for highly detailed studies at high magnifications, up to 1000x.. This allows installation of a AFM (Atomic Force Microscope) for studying areas at even higher magnifications than possible with the light system. |
-Stationary Samples: Special adaptation can be made so the optical pen is moved over the sample instead of the countrary. The pen can either scan at 90 degree or directly over the sample. Applications such as test of asphalt requires these changes. |
- ILIS Infrared Sensor: Adding an infrared sensor to your ST-400 will allow measurement through thicker more opaque materials such as plastics, glasses (transparent or semi-transparent). With this technique it is also possible to measure the thickness of silicon wafers to 0.1micron resolution. Please call us to discuss your applications. |
- Machine Vision Software: Image recognition software can be programmed to scan the sample with light sensors and produce depth/volume information. This is very useful to scan larger surfaces when looking for scratches or pits on the surface. Call us to discuss your specific applications. |
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Optical Measuring Pen- Description | |||||||||||
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Optical Measuring Pen - Specifications
Choice of several interchangeable displacement probes to fit Nanovea Profilers. |
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Measurement Range |
Working Distance (mm) |
Axial Resolution (nm) |
Axial Accuracy (nm) |
Spot Diameter (µm) |
Lateral Resolution (µm) |
Slope (°) up to 80° for specular surfaces |
Min Measurable Thickness (µm) |
| 20µm |
0.37 |
2 |
10 |
3 |
1.5 |
48 |
12 |
130µm |
3.3 |
5 |
20 |
2 |
1.1 |
43 |
7 |
| 300µm |
5.68 |
10 |
90 |
7.4 |
3.7
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25 |
25 |
| 350µm |
12.7 |
10 |
60 |
7 |
3.5 |
27 |
25 |
400µm |
11 |
12 |
60 |
2.6 |
1.3 |
28 |
15 |
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1mm |
23.9 |
30 |
300 |
14
6
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6 |
24
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23 |
1.2mm |
12.7 |
25 |
200 |
4 |
2 |
27 |
25 |
| 3mm |
26.9 |
100 |
600 |
25 |
12.5 |
12 |
220 |
3.5mm |
16.4 |
75 |
400 |
8 |
4 |
22 |
60 |
| 10mm |
66.9 |
300 |
900 |
51 |
25.5 |
12 |
425 |
12mm |
29 |
280 |
900 |
16 |
8 |
14 |
200 |
24mm |
222.3 |
1500 |
3000 |
100 |
50 |
5 |
1570 |
27mm |
19.6 |
600 |
3000 |
16 |
8 |
8.6 |
590 |
2µm - 100µm (Interferometric) |
42 |
10 |
100 |
20 |
10 |
7 |
2 |
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Return to Micro Photonics home page] [Return to mechanical testing menu] For Further information fill out our on-line request form or contact us at 1-866-333-4674: Micro Photonics Inc. Micro Photonics Inc. |
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