Welcome to Micro Photonics Home Page

Infrared Light - Interferometric Sensors (ILIS)
 

  
Features of ILIS Sensors
  • Precision down to 100nm
  • Large Range up to 600mm
  • Applicable to a wide variety of materials
  • Adaptable to various environment
  • Red Light Laser overlaps the infrared for easy localistation
  • Multiple measurement heads available for simultaneous and sequential measurements
  • Engineering services available for special integration
  • Demonstration system for a week rental. Please check with us on availability and price.

Introduction to ILIS

ILIS is a family of sensors that uses the technology of optical fibres and the working principle of white light interferometry. The measurement is however done with the near infrared wavelength 1310 nm. Contrary to laser techniques, ILIS allows true absolute distances measurements of remote targets placed in the beam. This sensor allows different applications such as the absolute measurement, thickness measurement, and tomography of materials for which the near infrared wavelength is penetrating (biologic tissues, plastics, polymers, ceramics, composite materials).

ILIS sensor can also be integrated onto a 3D optical profiler to combine thickness mapping with high resolution surface images.

 

 

Industries

  • Semiconductor
  • Microelectronic
  • Glass
  • Medical
  • Civil Engineering
  • Biology
  • Optics
  • Nanotechnology

General Applications

  • Thickness mapping of silicon wafer
  • Thickness measurement of plastic films
  • Thickness measurement of glass plates (line control of TV screen, follow up of watch glass thickness during polishing)
  • Localization of interfaces in guided wave optics
  • Distance measurements (examples such as measure of hight of melted glass at 1,600C, positioning of precision telescope mirror)
  • Liquid level measurements (melted Glass or Metal)
  • Analysis of the internal structure of scattering materials
  • Analysis of the structure of diffusants materials
 
Specifications
Model*
Measurement Range (mm)
Accuracy (µm)
Measurement Time (s)
Optical Power (mW)
PC Interface
LS-40
40
+/-1
1-5
0.15
PCI, PXI, PCMCIA
LS-200
200
+/-1
1-10
16
PCI, PXI, PCMCIA
LS-600
600
+/-1
20
16
PCI, PXI, PCMCIA
LI-600
600
+/-0.1
30
16
PCI, PXI, PCMCIA
* Up to four sequential measurement heads (selectable by software) can be added
[Return to Micro Photonics home page] [Return to Profilometry menu]  

For Further information fill out our on-line request form or contact us at 1-866-333-4674: 

 

Micro Photonics Inc.
PO Box 50443
Irvine, CA 92619-0443

Micro Photonics Inc. 
PO Box 3129 
Allentown, PA 18106-0129