DRE Discrete wavelength Ellipsometer with Windows software, applications libraries, single and double layer thickness measurement

This ellipsometer uses the Minsearch Algorithm which is based on a very fast error corrected stepper motor with 360000 steps/rotation. The absolute precision of the stepper motor is 0.002° (this is about 100 times better precision than that of an uncorrected stepper motor). The maximum speed is 720 000 steps/s. Applications for this instrument are standard ellipsometric measurements, and especially sub-monolayer measurements, such as measurements on surfaces which are contaminated with molecules
Features Based on a very fast error corrected stepper motor with a stepwidth of 0.001° Absolute stepper motor precision of 0.002° 2-10 seconds measurement time HeNe-Laser with standard wavelength 632.8 nm, optional 543 nm, 594 nm or 612 nm Variable angle: 30°-90° in 5° steps (manually moveable) Windows based simulation and calculation software with: Models with up to 9 layers Calculation of complex refractive index of layers / substrate and layer thickness Film layer evaluation In-situ simulation modelling for layer systems
Options Any wavelength in the range of 250 nm - 1100 nm (bandwidth: 10 nm) Computer driven alignment helps Micro spot options xy-positioning unit Rotating analyzer algorithm Goniometer (variable angle unit, motor driven)
Example of Simulation
	Simulation example of a 2 layer system
Examples using the x-y positioning unit
	A silicon surface is contaminated with an oil film (thickness: 50-80 Nanometers)
	After cleaning with a cleaning paper the oil film is reduced significantly. (In this case the cleaning paper is not forced.)
	After some more cleaning runs the surface is clean. In this special case the thickness resolution and reproducibility is in the order of 1-10 Picometer. The contamination of the surface can be measured in normal air. This contamination can normally be removed by a new cleaning.