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Standard objectives for All Fogale Profilometers
Objective
Num App.
interferential lat. resolution
Zoom
spatial sampling by CCD
Observation field (mm²)
Working distance
Ref. mirror Reflection
x 5
Michelson
0.12
2µm
x 1
x 0.5
x0.3
1.66µm
3.32µm
4.74µm
1.3 x 0.96
2.6 x 1.92
4.3 x 3.2
4 mm
5%, 25%,
50%, 85%
x 10
Mirau
0.25
1µm
x 1
x 0.5
x0.3
0.83 µm
1.66 µm
2.37 µm
0.64 x 0.48
1.28 x 0.96
2.13 x 1.60
3 mm
5%, 25%,
50%, 85%
x 20
Mirau
0.40
0.60µm
x 1
x 0.5
x0.3
0.42 µm
0.84µm
1.20 µm
0.32 x 0.24
0.64 x 0.48
1.06 x 0.80
2 mm
5%, 25%,
50%, 85%
x 50
Mirau
0.60
0.40µm
x 1
x 0.5
x0.3
0.16 µm
0.32µm
0.53µm
0.13 x 0.09
0.26 x 0.19
0.43 x 0.32
1 mm
5%, 25%,
50%, 85%
x 100
Linnik
0.95
0.30µm
x 1
x 0.5
x0.3
0.08µm
0.17µm
0.24µm
0.08 x 0.048
0.128 x 0.096
0.214 x 0.137
0.2 mm
5%, 25%,
50%, 85%
x 10
Linnik
0.25
1µm
x 1
x 0.5
x0.3
0.83µm
1.60µm
2.37µm
0.634 x 0.483
1.26 x 0.97
1.81 x 2.76
17 mm
5%, 25%
50%, 85%
x 2.5
Nikon
0.075
4µm
x 1
x 0.5
x0.3
3.32µm
6.64µm
9.48µm
2.6 x 1.92
5.2 x 3.84
8.6 x 6.4
10.3 mm
50%
x 5
Nikon
0.13
2µm
x 1
x 0.5
x0.3
1.66µm
3.32µm
4.74µm
1.30 x 0.96
2.60 x 1.92
4.30 x 3.20
9.3 mm
50%
x 10
Nikon
0.30
0.83µm
x 1
x 0.5
x0.3
0.83µm
1.66µm
2.37µm
0.64 x 0.48
1.28 x 0.96
2.13 x 1.60
7.4 mm
50%
x 20
Nikon
0.40
0.63µm
x 1
x 0.5
x0.3
0.42µm
0.84µm
1.20µm
0.32 x 0.24
0.64 x 0.48
1.06 x 0.80
4.7 mm
50%
x 50
Nikon
0.55
0.45µm
x 1
x 0.5
x0.3
0.16µm
0.32µm
0.53µm
0.13 x 0.09
0.26 x 0.19
0.43 x 0.32
3.4 mm
50%

 

 

Optimization of the mirror reflection (Michelson, Mirau and Linnik Objectives)
This optimization corresponds to an optical amplification of the ratio optical signal on noise, i.e an improvement of the intensity signal contrast, hence the measurement quality. This unique design allows to improve measurement on both extremes of reflectivity. With this feature the instrument can be adjusted
for best performance with reflective surface from 1% up to 100%

Mirror with different reflection power on each objective

Laboratory Services Available    

Microsurf 3D

Photomap 3D

Zoomsurf 3D

Other complementary profilometry system Nanovea ST-400

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PO Box 50443
Irvine, CA 92619-0443

Micro Photonics Inc. 
PO Box 3129 
Allentown, PA 18106-0129