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DS 95-50 & DS 95-200 SNOM Scanners
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Features
of the SNOM DS 95-50 & DS 95-200
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| Introduction to the DS 95-50 SNOM & DS 95-200 SNOM The DS95-509 SNOM scanner is mainly for surface characterization of smaller samples of optical devices. The measuring volume is 50x50x15micron with 15micron in the z-direction. The DS95-200 SNOM scanner is mainly for the characterization of large plane samples of relatively high samples of optical devices. Despite its large measuring volume of 200x200x15micron, the scanner is capable of recording high quality images with a high scanning speed. |
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Specifications
of the DualScope Scanner DS 95-50 & DS 95-200 SNOM |
Specification |
DS 95-50 SNOM |
DS 95-200 SNOM |
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| Scanner | |||
X,Y scan size: |
50 x 50 micron |
200 x 200 micron |
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Z range: |
2.7 micron |
15 micron |
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| ** These values can be significantly improved by calibration with relevant calibration standards for the measuring volume it is wished to use. If the scanning speed is kept at a constant value, the stated values can be improved by a factor of 2-5. | |||
| Vertical Accuracy | |||
Linearity: |
By active linearization module better than 0.5% of full dynamic range |
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Resolution: |
16-bit resolution, typically < 40 pm (rough sample), < 1 pm for flat samples with no physical slope |
16-bit resolution, typically < 200 pm (rough sample), < 1 pm for flat samples with no physical slope |
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Offset: |
Evaluated via sub-atomic step height on annealed GaN sample |
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Noise: |
300 pm PP, < 30 pm RMS |
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| Lateral Accuracy | |||
Linearity: |
At 50% of full scale accuracy better than 1% |
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Resolution: |
16-bit resolution on each axis < 80 pm |
16-bit resolution on each axis < 300 pm |
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Offset: |
Independent 16-bit |
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Noise: |
< 2 nm RMS |
< 5 nm RMS |
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| Approach | |||
Type: |
Automatic
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Travel: |
> 1.5 mm |
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Step Size: |
> 1 micron |
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Precision: |
> 50 nm |
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| Operation | |||
Standard Modes: |
SNOM |
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| Physical Properties | |||
Weight (excl. cable): |
250 g
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Cable length: |
2 m (other lengths available upon request)
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Features of the SNOM Software
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The SPM software is the standard software for operating all DualScope and Rasterscope Scanning Probe Microscopes, including SNOM and PolyScope Microscope for UHV measurements. The program is a combined data acquisition, data processing, data presentation, and measurement automation tool. SPM software can be combined with other image processing software like Mountain or SPIP. SPM software supports all standard and advanced modes, including simultaneous measurement and analysis, to ensure high productivity and great user satisfaction. |
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Micro Photonics Inc. Micro Photonics Inc.
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