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DualScope Scanner, DS 95-50-E & 95-200-E
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Features
of the DS 95-50-E & DS 95-200-E
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| Introduction to the DS 95-50-E & DS 95-200-E The Special E-model scanners DS 95-200-E and DS 95-50E are capable of performing electrical measurements, e.g. Conductive AFM, STM, and many other modes, Electrical properties can be measured by connection of an LCR meter. |
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Specifications
of the DualScope Scanner DS 95-50-E and DS 95-200-E |
Specification |
DS 95-50-E |
DS 95-200-E |
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| Scanner | |||
X,Y scan size: |
50 x 50 micron |
200 x 200 micron |
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Z range guaranteed: |
2.7 micron |
15 micron |
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Z range actual: |
3.5 micron |
18 micron |
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| ** These values can be significantly improved by calibration with relevant calibration standards for the measuring volume it is wished to use. If the scanning speed is kept at a constant value, the stated values can be improved by a factor of 2-5. | |||
| Vertical Accuracy | |||
Linearity: |
By active linearization module better than 0.5% of full dynamic range |
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Resolution: |
16-bit resolution, typically < 40 pm (rough sample), < 1 pm for flat samples with no physical slope |
16-bit resolution, typically < 200 pm (rough sample), < 1 pm for flat samples with no physical slope |
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Offset: |
Evaluated via sub-atomic step height on annealed GaN sample |
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Noise: |
300 pm PP, < 30 pm RMS |
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| Lateral Accuracy | |||
Linearity: |
At 50% of full scale accuracy better than 1% |
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Resolution: |
16-bit resolution on each axis < 80 pm |
16-bit resolution on each axis < 300 pm |
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Offset: |
Independent 16-bit |
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Noise: |
< 2 nm RMS |
< 5 nm RMS |
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| Approach | |||
Type: |
Automatic |
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Travel: |
> 1.5 mm |
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Step Size: |
> 1 micron |
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Precision: |
> 50 nm |
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| Operation | |||
Standard Modes: |
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| Objective | |||
Type: |
Bright Field |
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Focal Length: |
95 mm |
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Field of View: |
1 x 0.75 mm |
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Magnification: |
15 X |
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Resolution: |
< 2 micron, 512 x 350 pixels |
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| Physical Properties | |||
Weight (excl. cable): |
250 g |
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Cable length: |
2 m (other lengths available upon request) |
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Features of the SPM Software
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The SPM software is the standard software for operating all DualScope and Rasterscope Scanning Probe Microscopes, including SNOM and PolyScope Microscope for UHV measurements. The program is a combined data acquisition, data processing, data presentation, and measurement automation tool. SPM software can be combined with other image processing software like Mountain or SPIP. SPM software supports all standard and advanced modes, including simultaneous measurement and analysis, to ensure high productivity and great user satisfaction. |
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Applications
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Functional Parameters |
Bio Molecules |
Structure |
Semiconductors |
Cross section |
Cells |
Morphology |
DNA |
Mechanical properties |
Proteins |
3D structure |
Membrane structures |
Bump size |
Data storage devices |
Roughness |
Mechanical properties |
Micro and nano scale electrical measurement on MEMS |
Electrical measurements |
Chain sizes/structures |
Polymer |
Radio frequency based electrical measurement |
Thin films |
Particle size |
Coatings |
Characterization |
Viruses |
Nano size |
Nano wires |
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Nano particles |
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Micro Photonics Inc. Micro Photonics Inc.
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