Introduction to the Zoomsurf 3D

The Zoomsurf 3D is the most advanced white light interferometer and phase shift based system profiler available. For more information on the theory of the technique itself please follow this link. Ideal for laboratory and industrial settings where larger sample sizes and high resolutions are required.  Designed with an integrated anti-vibration system, the Zoomsurf provides highly stable metrology.  Motorized X-Y tables are standard, as is auto-focus viewing for automatic stitching of oversized areas.  Optional motorized tables 100mm, 200mm, or 300mm are available. The user can choose from a wide selection of various objectives (Mirau, Michelson, Linnik & Nikon).

Profilers can be equipped with a frequency generator for stroboscopic study of active MEMS & Membranes.  Allowing the user to study 3D real time vibration modes of MEMS & Membranes in motion, a breakthrough for the study of those materials.  Generator can pulse from 100Hz to 2MHz with steps of 0.1Hz and voltage from +10 to -10 Volts. All resonance frequencies of the device can easily be determined by automatic scan of all frequencies.   

The Zoomsurf  is equipped with the powerful Mountain Analysis Software.  The Mountain Profile software tool delivers cutting edge technology in analysis and visualization.  Create eye-catching reports with pseudo-color 3D and 2D images, contour diagrams, 3D lined and 3D continuous representation.   Other features include: Abbot and Firestone curve 3D depth distribution, fractal analysis, peak distribution, angle and distance measurement, material and void volume between two slices, hole analysis, power spectrum analysis, auto correlation and much, much more. Please visit our application page to see some of the results obtained with the system.

MEMS

Vibration Mode

Micro Device for Deformation Tests