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Breakthrough in the study of MEMS & Membranes

All profilers can be equipped with a frequency generator for stroboscopic study of active MEMS & Membranes.  Allowing the user to study 3D real time in-plane and out-of-plane vibration modes of MEMS & Membranes in motion, a breakthrough for the study of those materials.  Generator can sweep frequency range 100Hz to 2MHz with steps of 0.1Hz to find resonance frequencies with voltage amplitude up to +200 Volts.  

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Compatible Systems

Microsurf 3D, Photomap 3D, Zoomsurf 3D

 

MEMS Environmental Chamber

With the use of long working distance objectives, the chamber can be place on the stage of the Photomap 3D or the Zoomsurf 3D. Temperature can be varied from -25oC to 65oC, and the vacuum capabilities are down to 10-5 millibars with a turbo pump.

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Out-of-plane movement
In-plane movement

 

SPECIFICATIONS of Generator  
Frequency 100Hz to 2MHz
Frequency Steps  0.1Hz
Voltage +10 mV to +10 mV(200 V w/ high voltage option)
SPECIFICATIONS of Environmental Chamber  
Translation Stages (X, Y, Z) 25mm, 25mm, 12mm
Temperature Range -25oC to 65oC

Other complementary profilometry system, Nanovea ST-400

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For Further information fill out our on-line request form or contact us at 1-866-333-4674: 

 

Micro Photonics Inc.
PO Box 50443
Irvine, CA 92619-0443

Micro Photonics Inc. 
PO Box 3129 
Allentown, PA 18106-0129